SEM-EDS Analyzer

Purpose

The SEM-EDS Analyzer skill provides comprehensive scanning electron microscopy and energy dispersive X-ray spectroscopy analysis for nanomaterial morphology and elemental composition characterization.

Capabilities

• Automated SEM image analysis
• EDS spectrum acquisition and quantification
• Elemental mapping and line scans
• Particle size from SEM images
• Surface morphology characterization
• Cross-section analysis

Usage Guidelines

SEM-EDS Analysis

1. Image Acquisition

   • Optimize accelerating voltage for sample
   • Select appropriate detector (SE, BSE)
   • Minimize charging artifacts

2. EDS Analysis

   • Acquire spectra at appropriate kV
   • Apply ZAF corrections
   • Generate elemental maps

3. Quantification

   • Use standardless or standards-based
   • Report detection limits
   • Account for matrix effects

Process Integration

• Multi-Modal Nanomaterial Characterization Pipeline
• Nanodevice Integration Process Flow
• Nanolithography Process Development

Input Schema

{
  "sample_id": "string",
  "analysis_type": "imaging|eds_point|eds_map|line_scan",
  "accelerating_voltage": "number (kV)",
  "elements_of_interest": ["string"]
}

Output Schema

{
  "morphology": {
    "features": ["string"],
    "measurements": [{"feature": "string", "value": "number", "unit": "string"}]
  },
  "composition": [{
    "element": "string",
    "weight_percent": "number",
    "atomic_percent": "number"
  }],
  "elemental_maps": [{
    "element": "string",
    "image_path": "string"
  }]
}